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As with trends in electronic equipment everywhere, demands for miniaturization have been placed on sensors for detecting gas and fluid pressure, which are incorporated into air conditioners and electronic sphygmomanometers. OMRON has been working on electrostatic pressure and acceleration sensors since long before this demand arose. These sensors detect the minute change in electrostatic capacity between a moving electrode and a fixed electrode as it changes under pressure. Conventional sensors could not be physically miniaturized without sacrificing sensitivity. OMRON solved the problem by employing a specially developed donut diaphragm structure to attain the high output linearity necessary for accurate detection. At one-tenth (2.5 mm²) the size of conventional products, it offers the world's highest sensitivity in an ultra small package.

MMS (Micro Machined Sensor)
MMR (Micro Machined Relay)